R&D Facilities
SHINE Lab @ NUS
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SHINE Lab @ NTU
NUS SHINE Cleanrooms and Dry Facility for Heterogenous Integration and Testing
- 120 sqm class 10k cleanroom
- 320 sqm dry lab
- Tools for 8” fab and Si-based research
- Stealth dicing
- Grinding
- Bonding
- Characterization
- Failure Analysis
Take the virtual tour to discover our key capability and equipment @ NUS SHINE Heterogeneous Packaging and Test Lab >>>
Comprehensive List of Micro and NanoFabrication Facility for SHINE @ E6NanoFab
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NTU SHINE Cleanrooms and Dry Facility for Functional Materials Processing and Device Integration
Cleanroom 1
- 673 sqm (class 100 cleanroom)
- Mainly for Si-based research
- Tools for both 6” and 8” fab
Cleanroom 2
- 693 sqm separate class 10 and class 100 bays
- Mainly dedicated for non-CMOS work
- Processing tools for wafers 4 inch and below
Dry Facility for Characterisaiton, Testing and Simulation (FACTS)
- Environmental SEM Thermo Scientific Quattro S
- TEM Carl Zeiss Libra 120 Plus
