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R&D Facilities

SHINE Lab @ NUS

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SHINE Lab @ NTU

NUS SHINE Cleanrooms and Dry Facility for Heterogenous Integration and Testing

  • 120 sqm class 10k cleanroom
  • 320 sqm dry lab
  • Tools for 8” fab and Si-based research
  • Stealth dicing
  • Grinding
  • Bonding
  • Characterization
  • Failure Analysis

Take the virtual tour to discover our key capability and equipment @ NUS SHINE Heterogeneous Packaging and Test Lab  >>>

Comprehensive List of Micro and NanoFabrication Facility for SHINE @ E6NanoFab

SHINE & E6NanoFab Equipment

To download SHINE facilities brochure, click here.  |  To view E6NanoFab facilities,  click here

NTU SHINE Cleanrooms and Dry Facility for Functional Materials Processing and Device Integration

Cleanroom 1

  • 673 sqm  (class 100 cleanroom)
  • Mainly for Si-based research
  • Tools for both 6” and 8” fab

Cleanroom 2

  • 693 sqm separate class 10 and class 100 bays
  • Mainly dedicated for non-CMOS work
  • Processing tools for wafers 4 inch and below

Dry Facility for Characterisaiton, Testing and Simulation (FACTS)

  • Environmental SEM Thermo Scientific Quattro S
  • TEM Carl Zeiss Libra 120 Plus