{"id":9177,"date":"2022-05-10T16:45:57","date_gmt":"2022-05-10T08:45:57","guid":{"rendered":"https:\/\/shine.nus.edu.sg\/?p=9177"},"modified":"2022-10-06T18:04:53","modified_gmt":"2022-10-06T10:04:53","slug":"anneal-free-hzo-based-ferroelectric-field-effect-transistor-for-back-end-of-line-compatible-monolithic-3d-integration","status":"publish","type":"post","link":"https:\/\/shine.nus.edu.sg\/2022\/05\/10\/anneal-free-hzo-based-ferroelectric-field-effect-transistor-for-back-end-of-line-compatible-monolithic-3d-integration\/","title":{"rendered":"Anneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of-Line-Compatible Monolithic 3D Integration"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"9177\" class=\"elementor elementor-9177\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-635c54c3 elementor-section-height-min-height elementor-section-boxed elementor-section-height-default elementor-section-items-middle\" data-id=\"635c54c3\" data-element_type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-3927b7fe\" data-id=\"3927b7fe\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5a114396 elementor-widget elementor-widget-heading\" data-id=\"5a114396\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.19.0 - 28-02-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Publication<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-7980a9b2 elementor-section-full_width elementor-section-height-default elementor-section-height-default\" data-id=\"7980a9b2\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-3573ad5\" data-id=\"3573ad5\" data-element_type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-2a6a36c6 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"2a6a36c6\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-451182c\" data-id=\"451182c\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-64b30a0 elementor-widget elementor-widget-post-info\" data-id=\"64b30a0\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/shine.nus.edu.sg\/wp-content\/plugins\/elementor\/assets\/css\/widget-icon-list.min.css\"><link rel=\"stylesheet\" href=\"https:\/\/shine.nus.edu.sg\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-theme-elements.min.css\">\t\t<ul class=\"elementor-inline-items elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-3c3c170 elementor-inline-item\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-custom\">\n\t\t\t\t\t\t\t\t\t\tAnneal-Free HZO-Based Ferroelectric Field-Effect Transistor for Back-End-of-Line-Compatible Monolithic 3D Integration\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b00f713 elementor-widget elementor-widget-post-info\" data-id=\"b00f713\" data-element_type=\"widget\" data-widget_type=\"post-info.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<ul class=\"elementor-inline-items elementor-icon-list-items elementor-post-info\">\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-repeater-item-116777c elementor-inline-item\" itemprop=\"datePublished\">\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-calendar\"><\/i>\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text elementor-post-info__item elementor-post-info__item--type-date\">\n\t\t\t\t\t\t\t\t\t\tMay 10, 2022\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t<\/ul>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8c97d8b elementor-widget elementor-widget-button\" data-id=\"8c97d8b\" data-element_type=\"widget\" data-widget_type=\"button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-button-wrapper\">\n\t\t\t<a class=\"elementor-button elementor-button-link elementor-size-sm\" href=\"#nus\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-right\">\n\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-long-arrow-alt-down\"><\/i>\t\t\t<\/span>\n\t\t\t\t\t\t<span class=\"elementor-button-text\">Scroll down to learn more<\/span>\n\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-e8cdce4 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"e8cdce4\" data-element_type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-5845f377\" data-id=\"5845f377\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-4333a1d3 elementor-widget elementor-widget-spacer\" data-id=\"4333a1d3\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.19.0 - 28-02-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-34481d4 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"34481d4\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-aff89f3\" data-id=\"aff89f3\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-abbf3af elementor-widget elementor-widget-image\" data-id=\"abbf3af\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.19.0 - 28-02-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"635\" height=\"337\" src=\"https:\/\/shine.nus.edu.sg\/wp-content\/uploads\/sites\/10\/2022\/05\/03-VLSI-2022-Shih-Hao-Tsai-Anneal-Free_HZO-Based_Ferroelectric_Field-Effect_Transistor_for_Back-End-of-Line-Compatible_Monolithic_3D_Int.jpg\" class=\"attachment-medium_large size-medium_large wp-image-9321\" alt=\"\" srcset=\"https:\/\/shine.nus.edu.sg\/wp-content\/uploads\/sites\/10\/2022\/05\/03-VLSI-2022-Shih-Hao-Tsai-Anneal-Free_HZO-Based_Ferroelectric_Field-Effect_Transistor_for_Back-End-of-Line-Compatible_Monolithic_3D_Int.jpg 635w, https:\/\/shine.nus.edu.sg\/wp-content\/uploads\/sites\/10\/2022\/05\/03-VLSI-2022-Shih-Hao-Tsai-Anneal-Free_HZO-Based_Ferroelectric_Field-Effect_Transistor_for_Back-End-of-Line-Compatible_Monolithic_3D_Int-300x159.jpg 300w\" sizes=\"(max-width: 635px) 100vw, 635px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a49ce64 elementor-widget elementor-widget-text-editor\" data-id=\"a49ce64\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.19.0 - 28-02-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p><span style=\"font-size: 1rem\">In this work, we develop anneal-free hafnium zirconium oxide (HZO)-based ferroelectric field-effect transistor (FeFET) with low thermal budget (\u2264350 \u00b0C) suitable for monolithic 3-dimensional (M3D) integration technology. Integrating with room temperature oxide semiconductor, the demonstrated FeFET is fully back-end-of-line (BEOL)-compatible, featuring Ion\/off of &gt;105, memory window (MW) of 0.7 V, and good retention performance of 1\u00d7104 s. Such excellent electrical characteristics are achieved by HZO surface energy engineering for the ferroelectric orthorhombic phase formation. Furthermore, FeFET exists 32 controllable states with the linearity (\u03b1) of 0.31 and -5.03 in potentiation (Pot) and depression (Dep).<\/span><\/p>\n<p><em><span style=\"font-size: 1rem\">Researcher\/<\/span><span style=\"font-size: 1rem\">Author:&nbsp;<\/span><\/em><em style=\"font-size: 1rem\">Tsai&nbsp;<\/em><em style=\"font-size: 1rem\"><span style=\"font-size: 1rem\">Shih-Hao,<\/span><\/em><em style=\"font-size: 1rem\">&nbsp;Chen<\/em><em style=\"font-size: 1rem\"><span style=\"font-size: 1rem\">&nbsp;Chun-Kuei,&nbsp;<\/span><\/em><em style=\"font-size: 1rem\">&nbsp;Wang&nbsp;<\/em><em style=\"font-size: 1rem\"><span style=\"font-size: 1rem\">Xinghua,<\/span><\/em><em style=\"font-size: 1rem\">&nbsp;Chand<\/em><em style=\"font-size: 1rem\"><span style=\"font-size: 1rem\">&nbsp;Umesh,&nbsp;<\/span><\/em><em style=\"font-size: 1rem\">Hooda<\/em><em style=\"font-size: 1rem\"><span style=\"font-size: 1rem\">&nbsp;Sonu,&nbsp;<\/span><\/em><em style=\"font-size: 1rem\">Zamburg&nbsp;<\/em><em style=\"font-size: 1rem\"><span style=\"font-size: 1rem\">Evgeny, Aaron&nbsp;<\/span><\/em><em style=\"font-size: 1rem\">Thean&nbsp;<\/em><em style=\"font-size: 1rem\"><span style=\"font-size: 1rem\">Voon-Yew&nbsp;<\/span><\/em><\/p>\n<p><a href=\"https:\/\/ieeexplore.ieee.org\/abstract\/document\/9771033\">2022 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA)<\/a><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>\/*! elementor &#8211; v3.7.4 &#8211; 31-08-2022 *\/ .elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]&gt;a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px} Publication Scroll down to learn more \/*! elementor &#8211; v3.7.4 &#8211; 31-08-2022 *\/ .elementor-column .elementor-spacer-inner{height:var(&#8211;spacer-size)}.e-container{&#8211;container-widget-width:100%}.e-container&gt;.elementor-widget-spacer{width:var(&#8211;container-widget-width,var(&#8211;spacer-size));-ms-flex-item-align:stretch;align-self:stretch;-ms-flex-negative:0;flex-shrink:0}.e-container&gt;.elementor-widget-spacer&gt;.elementor-widget-container,.e-container&gt;.elementor-widget-spacer&gt;.elementor-widget-container&gt;.elementor-spacer{height:100%}.e-container&gt;.elementor-widget-spacer&gt;.elementor-widget-container&gt;.elementor-spacer&gt;.elementor-spacer-inner{height:var(&#8211;container-widget-height,var(&#8211;spacer-size))} \/*! elementor &#8211; v3.7.4 &#8211; 31-08-2022 *\/ .elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=&#8221;.svg&#8221;]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block} In this work, we develop anneal-free hafnium zirconium oxide (HZO)-based ferroelectric field-effect transistor (FeFET) [&hellip;]<\/p>\n","protected":false},"author":9,"featured_media":9321,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[30],"tags":[],"class_list":["post-9177","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-publications-2022-shine"],"_links":{"self":[{"href":"https:\/\/shine.nus.edu.sg\/wp-json\/wp\/v2\/posts\/9177"}],"collection":[{"href":"https:\/\/shine.nus.edu.sg\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/shine.nus.edu.sg\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/shine.nus.edu.sg\/wp-json\/wp\/v2\/users\/9"}],"replies":[{"embeddable":true,"href":"https:\/\/shine.nus.edu.sg\/wp-json\/wp\/v2\/comments?post=9177"}],"version-history":[{"count":10,"href":"https:\/\/shine.nus.edu.sg\/wp-json\/wp\/v2\/posts\/9177\/revisions"}],"predecessor-version":[{"id":10341,"href":"https:\/\/shine.nus.edu.sg\/wp-json\/wp\/v2\/posts\/9177\/revisions\/10341"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/shine.nus.edu.sg\/wp-json\/wp\/v2\/media\/9321"}],"wp:attachment":[{"href":"https:\/\/shine.nus.edu.sg\/wp-json\/wp\/v2\/media?parent=9177"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/shine.nus.edu.sg\/wp-json\/wp\/v2\/categories?post=9177"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/shine.nus.edu.sg\/wp-json\/wp\/v2\/tags?post=9177"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}