Publication
- High-Q Lithium Niobate Microrings Enabled by a Hybrid Dry Etching and Wet Polishing Technique
We present a CMOS-compatible hybrid fabrication approach that integrates dry etching with wet polishing to realize ultra-low-loss lithium niobate waveguides (0.28 dB/cm) and high-Q microring resonators (Q = 1.4 × 10⁶), providing a scalable pathway for large-scale integration of lithium niobate photonic networks.
Researcher/Author:
Yang Jie
Conference Name : CLEO Applications and Technology, 2025
Locations : Long Beach, California United States
Date : 4-9 May 2025